Flame spray pyrolysis optimization via statistics and machine learning

Cubic or monoclinic Y2O3:Eu nanoparticles by flame spray pyrolysis

Monocrystalline cubic and/or monoclinic Y2O3:Eu nanoparticles (10-50 nm) were synthesized continuously without post-processing by single-step flame spray pyrolysis (FSP). These particles were characterized by Xray diffraction (XRD), nitrogen adsorption (BET) and transmission electron microscopy (TEM). Photoluminescence (PL) emission was measured as well as the time-resolved PL-intensity decay. ...

Modeling Spray Pyrolysis Deposition

The deposition of a thin tin oxide film allows for the manufacture of modern gas sensors. Spray pyrolysis deposition is used to grow the required thin films, as it can be seamlessly integrated into a standard CMOS processing sequence. A model for spray pyrolysis deposition is developed and implemented within the Level Set framework. Two models for the topography modification due to spray pyroly...

Design and Preliminary Characterization of an Experimental Set- up for Nanoparticles Synthesis through Flame Spray Pyrolysis

Direct Deposition of CMOS-compatible Sensor Films by Flame Spray Pyrolysis

A rapid, wafer-level, dry process for in-situ synthesis, deposition of stable nanostructured, porous metal-oxide films for gas sensors is presented. Lace-like, nanostructured films of pure SnO2 featuring high porosity (98%) are selfassembled on a target substrate by flame spray pyrolysis (FSP). The nanoparticles are mainly polyhedral and monocrystalline with a grain size of 8.7 nm and crystal s...

Selectivity Enhancement by Using Double-Layer MOX-Based Gas Sensors Prepared by Flame Spray Pyrolysis (FSP)

Here we present a novel concept for the selective recognition of different target gases with a multilayer semiconducting metal oxide (SMOX)-based sensor device. Direct current (DC) electrical resistance measurements were performed during exposure to CO and ethanol as single gases and mixtures of highly porous metal oxide double- and single-layer sensors obtained by flame spray pyrolysis. The re...